NDT Elemental Analysis with a microXRF Spectrometer

SEM-XRF : Integrated e⁻Beam / X-ray XRF Elemental Analysis

X-ray Sources for Electron Microscopy (SEM)

IXRF Systems’ microXRF X-ray sources for Scanning Electron Microscopes (SEM): addition of an polycapillary X-ray tube and Iridium Ultra software will transform your SEM’s quantitative analytical capabilities. Higher peak to background ratios enable greater elemental sensitivity for higher Z elements: sensitivity exceeding e^–-beam excitation by a factor of 10-1000X. Exceptional beam stability, together with a modern SDD X-ray detector, afford higher precision with ppm-level sensitivity. Non-conductive materials may be analysed without any special preparation or coating. IXRF integrates with your SEM to deliver full spectrum analysis using excitation from both the e^–-beam and X-ray source.

Advanced microXRF System for SEM

Distribution analysis stores complete spectra for every map point for on- and off-line analysis. Samples can be analysed with micro-spot X-ray beam and e⁻-beam simultaneously without position change. Both excitation methods are integrated in IXRF’s analytical software suite. No interference with normal SEM operation, the X-ray source can stay in its measurement position permanently. microXRF is completely non-destructive and does not require the sample to be coated. Use your existing EDS detector system; IXRF supports most all microscopes.

Applications

---

---