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QDUKI and MTIF Partnership
To benefit the life and semiconductor market sectors and research labs, and to accelerate the development of new, innovative technologies
The partnership agreement between Quantum Design, UK and Ireland (QD) and Medical Technologies Innovation Facility (MTIF) gives customers the ability to view and utilise the J A Woollam IR VASE II Spectroscopic Ellipsometer. Scroll down for more information about getting your bespoke one-off measurements on the IR VASE II.
“This partnership provides companies with a unique opportunity to use cutting edge Ellipsometry technology supported by renowned research expertise. These capabilities are usually unavailable to all but the largest organisations. This partnership allows organisations of every size the opportunity to accelerate their development programmes.” Professor Mike Hannay, Managing Director of the Medical Technologies Innovation Facility (MTIF).
Characterise thickness and IR index of single and multilayer films. Bulk uncoated substrates. Infrared optical systems. AR, HR, single-layer and multilayer coatings. High-index and low-index.
Epitaxial Layers, Doping Concentration and Doping Profiles
At infrared wavelengths, the difference in free-carrier levels can cause optical contrast between epitaxial or implanted layers. This gives IR-VASE® excellent sensitivity to epitaxial layer thickness and substrate doping concentration. The ellipsometer also has good sensitivity to carrier gradients at interfaces. Carrier profiles show near-perfect in agreement when nondestructive IR-VASE® and destructive SIMS measurements are compared.
Multilayer films can be extensively studied using the wide spectral range and variable angle capability of the IR-VASE®. Multiple angles provide additional information by changing the light’s path length through each layer. The following results show sensitivity to 3 layers. Infrared optical contrast between similar materials allows measurement of each layer’s thickness.
Phonon Structure (Compound Semiconductors)
The Wide spectral range IR-VASE® is important for phonon absorption studies. Data on the left show phonon modes of a GaN / AlGaN laser structure, modelled to determine alloy ratios, doping concentrations, and film quality.
Molecular Bond Vibrations
Like standard FTIR spectroscopy, IR ellipsometry relies on the information about molecular bond vibrations. Infrared absorption caused by these vibrations can be studied in bulk or thin film materials. IR ellipsometry offers increased sensitivity over FTIR spectroscopy. It also presents the advantage of obtaining both n and k rather than just absorbance values. Figures below show measured optical constants of a silicone thin film with vibrational absorptions labeled.