J A Woollam M2000 Spectroscopic Ellipsometer

Ellipsometer for thin film characterisation 

The M-2000 line of spectroscopic ellipsometers is engineered to meet the diverse demands of thin film characterisation. An advanced optical design, wide spectral range, and fast data acquisition combine in an extremely powerful and versatile tool. 

M-2000 delivers both speed and accuracy.  J A Woollam’s patented RCE technology combines Rotating Compensator Ellipsometry with high-speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second with a wide array of configurations. 

M-2000 is the first ellipsometer to truly excel at everything from in-situ monitoring and process control to large-area uniformity mapping and general purpose thin film characterisation. No other ellipsometer technology acquires a full spectrum faster.


  • Wide Spectral Range
  • Collect over 700 wavelengths from the ultraviolet to the near infrared – all simultaneously
  • Flexible System Integration
  • With modular optical design, the M-2000 is suited for direct attachment to your process chamber or configured on any of Woollam’s table-top bases.
  • Accuracy
  • Advanced design ensures accurate ellipsometry measurements for any sample.

Dr Shayz Ikram

Technical Director
tel:+44 (0)1372 378822


The horizontal M-2000 system offers wide range of options like large area mapping, liquid cells, and heat stages.
Ideal for general use and large samples.

The vertical M-2000 system offers wide angle range and flexibility.
Independent control of sample and detector angle for
diverse reflection or transmission measurements.

Translator size:50x50mm XY

The smallest M-2000 spot size available (25 by 60 microns) for demanding feature sizes.



Supplier Info

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