J A Woollam CompleteEase Ellipsometer Software

Spectroscopic Ellipsometer Software 

The next generation of ellipsometry software has arrived with CompleteEASE, J A Woollam’s revolutionary new software for their ellipsometers. It’s easier than ever to use, and with the World-class quality you’ve come to expect from Woollam Company.

CompleteEASE is an all-inclusive software package to handle all your ellipsometry requirements. Conveniently measure the uniformity of your samples with automated sample mapping. Collect in-situ data with spectroscopic ellipsometry on your process chamber or with add-on temperature control stage or liquid cell.



  • Create your own recipes to collect data, automate mapping and analyse your samples – contained in one step. Convenience and simplicity combine for push-button operation
  • CompleteEASE includes built-in models covering a wide range of typical samples.
    • Built-in models conveniently describe how to process the data to determine thin film properties.
    • CompleteEASE also includes over 400 material files and dispersion equations to approach a wide variety of thin films – from dielectrics and organics to semiconductors and metals
  • The CompleteEASE Thickness Pre-Fit quickly and automatically finds the best thickness to match the data using a special patented algorithm. Eliminate the guesswork when nominal film thickness is unknown
  • The B-spline layer was developed in CompleteEASE as an alternative to direct fits or oscillator models. It combines the benefits of
    • (i) reduced number of fit parameters,
    • (ii) complete flexibility in optical constants for any material
    • (iii) remove the guesswork of where to place oscillators and what type to choose.
  • Especially valuable for describing complex dispersion shapes. Advanced features of the B-spline include the ability to customise resolution and maintain KK consistency.
  • Generalised Oscillator Layer

Dr Shayz Ikram

Technical Director
tel:+44 (0)1372 378822



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