J A Woollam VUV VASE Spectroscopic Ellipsometer

Ellipsometer covering the vacuum UV to the NIR

The VUV-VASE® variable angle spectroscopic ellipsometer is the gold standard for optical characterisation of lithography thin films. It measures wavelengths from vacuum ultraviolet (VUV) to near infrared (NIR). This provides incredible versatility to characterise numerous materials: semiconductors, dielectrics, polymers, metals, multi-layers and liquids such as immersion fluids.


  • Wide Spectral Range
  • The VUV-VASE covers wavelengths from below 140nm to 1700nm
  • High Accuracy
  • Utilising Woollam’s patented AutoRetarder, the VUV-VASE guarantees accuracy for any sample measurement
  • Convenient Sample Loading
  • Special design allows fast, efficient sample loading without contaminating system purge
  • Protect Your Samples
  • The monochromator is placed before the sample to limit exposure of photosensitive materials

Dr Shayz Ikram

Technical Director
tel:+44 (0)1372 378822



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