J A Woollam iSE Spectroscopic Ellipsometer

Ellipsometer for  real-time monitoring of thin film processing

The iSE in-situ spectroscopic ellipsometer has been developed for real-time monitoring of thin film processing.  Using Woollam’s proven technology, the iSE enables users to optimise optical properties of deposited films, control film growth with sub-angstrom sensitivity, and monitor growth kinetics.tic, electric).

With the power of spectroscopic ellipsometry, the iSE is capable of measuring thickness and optical properties with much higher certainty than other techniques.

 

FEATURES

  • Compact
  • New compact design enables easy integration onto any ALD chamber
  • Flexible
  • Measure any kind of material-dielectrics, metals, metal oxides and more
  • Affordable
  • The power of spectroscopic ellipsometry at a reasonable price
  • Ease-of-Use
  • User friendly interface for real time data analysis and easy chamber integration
  • Fast, Wide-Spectrum Measurements
  • While others claim fast measurements, only J A Woollam ellipsometers provide fast, spectroscopic data over a wide wavelength range. The iSE utilises a new optical design with Dual-Rotation™ in combination with modern CCD detection to provide hundreds of wavelengths in a fraction of a second

 

Dr Shayz Ikram

Technical Director
tel:+44 (0)1372 378822
shayz@qd-uki.co.uk

VIDEOS

Downloads

Supplier Info

For even more information, why not visit our suppliers website.

Visit website

Applications

Follow us:

 

Keep up to date with our latest product news and developments. Join our mailing list

Top