J A Woollam iSE Spectroscopic Ellipsometer

Ellipsometer for  real-time monitoring of thin film processing

The iSE in-situ spectroscopic ellipsometer has been developed for real-time monitoring of thin film processing.  Using Woollam’s proven technology, the iSE enables users to optimise optical properties of deposited films, control film growth with sub-angstrom sensitivity, and monitor growth kinetics.tic, electric).

With the power of spectroscopic ellipsometry, the iSE is capable of measuring thickness and optical properties with much higher certainty than other techniques.



  • Compact
  • New compact design enables easy integration onto any ALD chamber
  • Flexible
  • Measure any kind of material-dielectrics, metals, metal oxides and more
  • Affordable
  • The power of spectroscopic ellipsometry at a reasonable price
  • Ease-of-Use
  • User friendly interface for real time data analysis and easy chamber integration
  • Fast, Wide-Spectrum Measurements
  • While others claim fast measurements, only J A Woollam ellipsometers provide fast, spectroscopic data over a wide wavelength range. The iSE utilises a new optical design with Dual-Rotation™ in combination with modern CCD detection to provide hundreds of wavelengths in a fraction of a second




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