J. A. Woollam iSE Spectroscopic Ellipsometer

Ellipsometer for  real-time monitoring of thin film processing

The iSE in-situ spectroscopic ellipsometer has been developed for real-time monitoring of thin film processing.  Using Woollam’s proven technology, the iSE enables users to optimise optical properties of deposited films, control film growth with sub-angstrom sensitivity, and monitor growth kinetics, electric).

With the power of spectroscopic ellipsometry, the iSE is capable of measuring thickness and optical properties with much higher certainty than other techniques.

COMMON REAL-TIME ELLIPSOMETRY MEASUREMENTS

• Thin film thickness from single or multiple layers
• Growth or etch rates
• Process kinetics
• Optical constants
• Surface quality before and after processing
• Film nucleation behaviour
• Process conditions that affect optical constants (deposition rate, temperature, pressure, etc.)
• Real-time end-point detection

 

FEATURES

  • Compact
  • New compact design enables easy integration onto any ALD chamber
  • Flexible
  • Measure any kind of material-dielectrics, metals, metal oxides and more
  • Affordable
  • The power of spectroscopic ellipsometry at a reasonable price
  • Ease-of-Use
  • User friendly interface for real time data analysis and easy chamber integration
  • Fast, Wide-Spectrum Measurements
  • While others claim fast measurements, only J A Woollam ellipsometers provide fast, spectroscopic data over a wide wavelength range. The iSE utilises a new optical design with Dual-Rotation™ in combination with modern CCD detection to provide hundreds of wavelengths in a fraction of a second

 

Profile
David Want Quantum Design UK and Ireland
Name

DAVID WANT

Job Title

Product Specialist

Phone
Email
Profile
Name

TECHNICAL SALES TEAM

Job Title

Support Team

Phone
Email
Profile
Name

ASHLEY CRANE

Job Title

Sales Manager

Phone
Email
Profile
Dr Jordan Thompson Quantum Design UK and Ireland
Name

JORDAN THOMPSON

Job Title

Service Engineer

Phone
Email
Profile
Quantum Design UK and Ireland Dr Shayz Ikram
Name

DR SHAYZ IKRAM

Job Title

Product Specialist

Phone
Email
Profile
Name

JOSH HOOK

Job Title

Sales/Service Support Engineer

Phone
Email
Profile

Name

LUKE NICHOLLS

Job Title

Technical Sales Engineer

Phone

+44 (0)1372 378822

Email

luke@qd-uki.co.uk

VIDEOS

Downloads

Supplier Info

For even more information, why not visit our suppliers website.

Visit website

Applications

Follow us:

 

Keep up to date with our latest product news and developments. Join our mailing list

Top