Moxtek NanoStructure Solutions™
Moxtek has been producing nanostructured optical components for over 20 years. Moxtek offer high volume wafer replication of various nanostructure devices. The versatile capabilities are used to manufacture functional nanostructure devices including: microlens arrays, waveguides, patterned metasurfaces, Diffractive Optical Elements (DOEs), photonics crystals, and biosensor arrays. These devices are used for imaging, illumination, and display systems for a variety of applications including: automotive, medical/dental imaging, camera systems, and many others
Moxtek offers prototyping samples on our recurring Design Master Shuttle. This NIL Design Master Shuttle includes space for multiple (different) design structures, which allows engineers to test several designs on a single shuttle iteration thereby reducing development time/cost. We can add your unique design on our next Design Master Shuttle for prototyping your latest lens or nanostructure optical device. These design shuttles are processed multiple times a year.
Moxtek collaborates with customers to design, verify and create solutions for high volume manufacturing. They provide options for prompt design iterations and print optimisation. Moxtek uses Statistical Process Control (SPC) monitoring of postprint Critical Dimension (CD) repeatability
MANUFACTURING CAPABILITIES
- High Volume Manufacturing
- Prototyping Options
- NanoImprint Lithography (NIL)
- Design Master Shuttle
- Master creation, Stamp making
- Deposition (PECVD, Sputter, ALD)
- Etching (metals, oxides low to high refractive index)
- AFM and SEM
- Optical metrology and inspection
CONFIGURABLE PARAMETERS
- Minimum CD: 30nm
- Master Aspect Ratio: ≤ 2 (CD Height/Width)
- Master Wafer Type: Silicon (Preferred)
- Master Wafer Size: Ø300mm, Ø200mm (preferred) Ø150mm (acceptable)
- Residual Layer Thickness: 15nm < X < 25nm
- Substrate Detail: Ø200mm glass/fused silica/silicon/sapphire Thickness: 0.675mm to 1.8mm
- Resist Mask: Oxide-based sol gel, UV curable, or nano particle resist
Profile
Profile
Profile
Profile
Profile
Profile
Profile
