Measure your film thickness and optical constants by ellipsometry

Single wavelength ellipsometry or spectroscopic ellipsometry, is a method to determine layer thickness and optical constants of thin films or substrates. An ellipsometer, either a single wavelength or a spectroscopic ellipsometer, measures the polarisation change at reflection (or transmission in case of anisotropic sample).

We offer a wide range of spectroscopic ellipsometers, optimised for your particular application. 

The flexible ellipsometer VASE, based on a scanning monochromator is ideal for all kinds of R&D applications, covering the widest spectral range in the market from 140 to 3200 nm, or in combination with IR-VASE up to 30 µm. Alternatively, Woollam’s fast CCD based, rotating compensator spectroscopic ellipsometers M-2000 and RC2 are available for ex-situ as well as in-situ applications. Woollam have also introduced the iSE which is designed specifically for in-situ monitoring of thickness and optical properties. Recently introduced, the Theta SE is a push-button spectroscopic ellipsometer for characterizing thin film uniformity.

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