Measure your film thickness and optical constants by ellipsometry
Single wavelength ellipsometry or spectroscopic ellipsometry, is a method to determine layer thickness and optical constants of thin films or substrates. An ellipsometer, either single wavelength or a spectroscopic, measures the polarisation change at reflection (or transmission in case of anisotropic sample). JA Woollam is the worldwide leader and the company has been perfecting spectroscopic ellipsometry for over 30 years.
We offer a wide range of spectroscopic ellipsometers, optimised for your particular application.
The flexible ellipsometer VASE, based on a scanning monochromator, is ideal for all kinds of R&D applications, covering the widest spectral range in the market from 140 to 3200 nm, or in combination with IR-VASE up to 30 µm. Alternatively, Woollam’s fast CCD based, rotating compensator spectroscopic ellipsometers M-2000 and RC2 are available for ex-situ as well as in-situ applications. Woollam have also introduced the iSE which is designed specifically for in-situ monitoring of thickness and optical properties. Recently introduced, the theta-SE is a push-button spectroscopic ellipsometer for characterising thin film uniformity.