J A Woollam theta SE Spectroscopic Ellipsometer

Ellipsometer for characterising thin film uniformity

The theta-SE is a push-button spectroscopic ellipsometer for characterizing thin film uniformity, featuring advanced ellipsometry instrumentation in a compact package at an affordable price

The theta-SE comes equipped with 300 mm sample mapping, small-spot measurement beam, fast sample alignment, look-down camera and the latest Dual-Rotation ellipsometer technology. It has everything you need to measure the spatial uniformity of your film thickness and optical properties.

Sample throughput is optimised by using fast point-to-point translation, high-speed sample alignment and Dual-Rotation ellipsometer technology for continuous data collection. and the patent-pending, Dual-Theta rotation stage enables full, 300 mm mapping, yet the instrument footprint is only slightly larger than a 300 mm wafer. Furthermore, automated data analysis and built-in reporting enables push-button operation and quick access to measurement results.

The theta-SE is a push-button spectroscopic ellipsometer for characterising thin film uniformity. It features advanced ellipsometry instrumentation in a compact package at an affordable price.

 

FEATURES

  • Dual-Rotation Optical Design
  • A Mapping Overview of 300mm Diameter
  • A Wavelength Range of 400-1000 nm
  • 190 Wavelengths
  • DetectorCCD
  • Focusing Optics Included
  • A Data Acquisition Rate of 0.3 sec. [Fastest] 1-2 sec. [Typical]
  • A Beam Diameter Nominal: 250 x 600 μm on sample
  • Spectroscopic ellipsometry and advanced g-SE or MM-SE
  • An Angle of Incidence 65° fixed for all measurements
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David Want Quantum Design UK and Ireland
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DAVID WANT

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JORDAN THOMPSON

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Quantum Design UK and Ireland Dr Shayz Ikram
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DR SHAYZ IKRAM

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