We just celebrated holding our 24th Annual J. A. Woollam Spectroscopic Ellipsometry Workshop and CompleteEASE software course.
Our partners at the J. A. Woollam Company are solely focused on the advancement of spectroscopic ellipsometry. Since 1987 they have led the industry in research and development with 200+ patents.
The event was hosted at the University of Manchester, with a spectroscopic ellipsometry workshop the first day, followed by a three day long intensive course on the CompleteEASE software.
Workshop
This one day event was open to those who are experienced with ellipsometry or new to it. The format of the workshop included an introduction, fundamentals of ellipsometric data analysis, and an overview of ellipsometric applications in both research and production. New emerging applications were also highlighted.
Application engineers from J. A. Woollam gave talks on the following topics:
- Theory
- Applications
- Products
- Demonstration
- J A Woollam alpha-SE Ellipsometer
The Speakers
Jeremy Vanderslice, Application Engineer, J. A. Woollam Company
Jeremy received his Master’s degree in Mechanical Engineering from the University of Nebraska. He is working towards his Ph.D. in Engineering where he is studying pulsed-laser deposited films using spectroscopic ellipsometry and is currently building a chamber for in-situ ellipsometric characterisation of PLD-grown films.
Andrew Martin, Application Engineer, J. A. Woollam Company
Andrew Martin joined J.A. Woollam as an Applications Engineer after completing his master’s degree in Electrical engineering in 2009. As an applications engineer, Martin provides support to customers through multiple communication media, including email, phone, and on-site short courses.
Prof. Alexander Grigorenko, Professor, Condensed Matter Physics Group, University of Manchester
Professor Alexander Grigorenko is a key part of the Condensed Matter Physics Group at the University of Manchester. The group was the first to extract optical constants of graphene using variable angle spectroscopic ellipsometry (namely, Woollam M2000F) with the help of the Wvase32 software.
CompleteEASE Course
This three day course aimed to teach attendees how to get the very best from the CompleteEase Software. These short courses include extensive training through examples and interaction between other students and instructors.
Course Content:
- Ellipsometry overview and CompleteEASE Navigation
- Transparent materials and non-idealities
- B-Spline function
- General Oscillator Modeling
- Thin absorbing films and Multi-Sample Analysis
- Mapping and Dynamic Data Analysis
See what was covered at this year’s workshop and course in the full agendas available to view here…
My group at Teledyne use the J A Woollam M2000 Spectroscopic Ellipsometer for some development activities, to determine the optical properties of new AR coating materials, or new AR Coating designs with existing or new materials.
We use the M2000 to monitor all our AR Coatings and some thin absorbing coatings, (d, n and k). It is also used to monitor photolithography, endpoint etch removal checks, (when selectively etching upper layers from underlying structure). More recently we are performing scans to monitor Ion implant uniformity across Ø150mm and Ø200mm silicon wafers. We use scans from time-to-time to monitor coating uniformity. We do physical vapour depositions, both with and without Ion Assisted Deposition. In-situ monitoring is via quartz oscillators. We have Al2O3 ALD capability. There is no need for in-situ monitoring, as ALD is very repeatable. We measure a witness sample from every deposition run and at least one production wafer.
In my opinion the JA Woollam M2000 spectrographic ellipsometer is the best and most reliable analytical kit I have ever used.
Andrew Kelt, Teledyne
Attendees of the CompleteEASE all receive a certificate of completion.
Don’t want to miss out next time?
If you’d like to be among the first to receive an invitation to next year’s event, or others, please do join our mailing list.
What’s Your Application?
Always on hand to answer all your ellipsometry questions, is our Technical Director Dr. Shayz Ikram.
