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J. A. Woollam alpha SE Spectroscopic Ellipsometer
Ellipsometer for spectral range of 380-900 nm
For routine measurements of thin film thickness and refractive index, this ellipsometer allows you to mount a sample, choose the model that matches your film, and press “measure”. You have results within seconds.
FEATURES
Focussing
- Perfect for non-uniform or small samples.
- Reduce beam diameter to ~0.3mm
- Quick and easy magnetic attachment – optics snap into position
- No alignment or calibration required
Camera
- View the focused beam measurement location.
- 10mm by 7mm field of view
- Integrated image within CompleteEASE software
Translation
- Fine-adjustment of the measurement location.
- Manually adjust 12mm XY range with .025mm resolution
- Integrated vacuum stage holds sample in place
- Position the focused beam spot anywhere on the sample
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SPECIFICATIONS
| Ellipsometer Configuration | RCE |
| Wavelength Range | 380-900 nm |
| Number of Wavelengths | 180 |
| Detector | CCD |
| Angles of Incidence | 65°, 70°, 75° or 90° (straight-through) |
| Data Acquisition Rate (Complete Spectrum) |
3 sec. – Fast mode 10 sec. – Standard mode 30 sec. – High-precision mode |
| Max substrate thickness | 16mm |
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Supplier Info
Applications
Dielectric Films
With fast measurement speed and push-button operation, the alpha-SE® is ideal for qualifying thin films. Single-layer dielectrics on silicon or glass substrates can be measured in seconds. Log results for easy-to-use comparisons in both graphical and tabular formats.
Self-Assembled Monolayers
Phase information of a spectroscopic ellipsometry measurement is highly sensitive to very thin films (<10nm). Self-assembled monolayers can be assessed and quickly compared using the alpha-SE.
Absorbing Films
Advanced models provide quick and efficient fits for a wide variety of materials you may encounter.
Coatings on Glass
Patented technology allows accurate measurements on any substrate: metal, semiconductor, or glass. On transparent substrates, the alpha-SE® measures depolarisation to correct for light returning from the backside of the substrate. This unwanted light can confuse other ellipsometers, but the alpha-SE® ensures accurate optical constants.
