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GETec Microscopy In-Situ AFM in SEM
In situ AFM analysis in your SEM
AFSEM™ is an atomic force microscope (AFM) by GETec Microscopy, designed for integration in a SEM or Dual beam (SEM/FIB) microscope. Its open access design allows to simultaneously operate SEM and AFM inside the SEM vacuum chamber. The complimentary image data of AFM and SEM enable unique characterisation of your sample.
AFSEM lets you simultaneously image your sample with high resolution, create true 3D-topography representations, and accurately measure heights, distances and even material properties, all while maintaining the large SEM field of view to position your AFSEM™ cantilever exactly where you want it.
AFSEM fits into most SEM or dual beam (SEM/FIB) systems: it is mounted directly on the door of the system chamber, leaving the stage unaltered. In addition, a slim tip-scanning design in combination with self-sensing cantilevers requires only 4.5 mm space between the pole shoe of the electron column and the sample. As a result, AFSEM is compatible with a wide range of standard and optional stages, and can handle virtually any sample that fits the system chamber. This elegant design allows detection of sub-nanometer step heights in the SEM.
Multiple modes are available through specific self-sensing cantilevers, for example for Static and Dynamic Imaging, Phase Contrast, Force Spectroscopy, Force Modulation, and Conductive AFM, with more modes and cantilevers to follow. Click here for more info
- In situ AFM analysis in your SEM
- Correlative AFM and SEM analysis
- Compatible with most SEMs without impeding normal operation
- Many analysis techniques in parallel to AFM and SEM
- Intuitive handling with SCL’s self-sensing cantilever
Analysis of Tensile Stress Samples with AFSEM
A scanning electron microscope (SEM) is a powerful tool to study the surface changes and fracture mechanics of tensile stress samples. However, quantitative height information and crack/roughness analysis with sub-nanometre resolution is not possible with the SEM. With AFSEM, the strengths of SEM and AFM are easily combined with tensile stages for correlative, in-situ analysis of tensile stress samples.
Nanoindentation Analysis with AFSEM Inside the SEM
SEM is widely used to study the surface structure after nanoindentation; its large field of view with nanometer resolution allows detecting early stages of surface defects indicating the onset of material surface failure. However, quantitative height information is not available. AFM is an established tool for quantitative analysis of nanoindents. With AFSEM™, SEM and AFM can be combined with nanoindentors for correlative, in situ analysis of nanoindents.
Correlative In-Situ Analysis of Bone Collagen
Correlative AFM/SEM microscopy allows complementary SEM and AFM topography information of lacunae and collagen fibres. Real 3D representation of the topography can be used for analysing collagen fibres with high resolution.
Conductive AFM in SEM Using Solid Platinum Tips
With AFSEM the gradual increase of conductivity in a partial electron beam irradiated carbon matrix (Pt(C)) can be studied directly between irradiation steps, without sample transfer. Since the measurements are performed in the vacuum of the SEM, contamination issues that are generally encountered in air are reduced. For such measurements the AFSEM works with conductive, self-sensing cantilevers with sharp, solid platinum tips