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Self-Sensing Cantilevers for Microscopy
Implement your AFM cantilever ideas even in small batch fabrications
SCL-Sensor.Tech develops and manufactures silicon piezo-resistive self-sensing cantilevers. This type of all-electrical cantilever allows completely new applications in the fields of AFM, nanoprobing, force measurement and other sensing applications.
Self-sensing cantilevers are equipped with a full piezo-resistive Wheatstone bridge that directly measures the cantilever signal electrically, removing the space-consuming requirement for an optical readout. Two variable resistors are on the cantilever and two on the chip. The cantilever chip is bonded onto a small PCB with a small connector for a quick and highly reproducible cantilever exchange. The sensor signal is read out and amplified by a small pre-amplifier PCB. This enables an easy and seamless integration with various instruments (e.g., SEM, TEM and many other measurement systems). The self-sensing cantilevers are available with a variety of resonance frequencies and spring constants.
Intuitive handling with self-sensing cantilever technology
- Silicon piezo-resistive self-sensing cantilevers enable complete new applications in the fields of Atomic Force Microscopy (AFM), nanoprobing, torque-magnetometry, or other sensing applications such as gas dynamics and media properties.
- These cantilevers exhibit an integrated piezo-resistive Wheatstone bridge which directly measures the cantilever deflection electrically. This readout technique removes the space-consuming optical laser readout needed before.
- Self-sensing technology enables an easy and seamless integration with various instruments (e.g. SEM, TEM, but also many other measurement systems). The cantilever chip is bonded onto a small PCB with a small connector for a quick cantilever exchange.
- Standard SCL self-sensing cantilevers exhibit a tip with a tip radius smaller than 15 nm and are available with a variety of resonance frequencies and spring constants. Tipless and long-life SCD-tip cantilevers are available, too.