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Sigray Attomap µ-XRF system
Highest Resolution XRF Microscope on the Market. Large Stage Travel and Enclosure
Sigray, Inc. develops advanced and completely new approaches to x-ray technology that formerly could only be found in synchrotron beamline experimental setups. The µ-XRF system from Sigray, AttoMap™ combines the resolution and the sensitivity from synchrotron XRF results and combines them into a laboratory-based instrument. Beside the AttoMap™ x-ray fluorescence system, Sigray is also offering proprietary x-ray optics and a new and breakthrough x-ray source named FAAST™.
The powerful sensitivity and high resolution of the AttoMap produces synchrotron-quality elemental distribution mapping of trace elements for a wide range of research applications, spanning from the life and materials sciences to industrial use for pharmaceuticals, natural resources (oil and gas, mining) and semiconductor failure analysis. Click here for an amazing gallery of MicroXRF results
The AttoMap™ x-ray analytical microscope offers the highest resolution and the highest sensitivity one can find in a laboratory based microXRF system.
The AttoMap™ system can be used for transmission-based x-ray structural analysis as well as for fluorescence chemical mapping. The system has a chemical sensitivity of <1-10 ppm for trace element analysis and the measuring time is within 1 second.
The patented FAAST™ microfocus x-ray source (Fine Anode Array Source Technology) is based on a complete new x-ray source design. The x-ray target is made out of fine metal microstructures that are encapsulated in a diamond substrate. This complete new design was enabled due to recent developments in semiconductor processing techniques.
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Key Advantages
- Highest resolution laboratory microXRF Achieve down to single digit microns (3-5 µm) with high resolution optic
- Sub-ppm sensitivity Quantify down to sub parts per million (ppm) levels with Sigray’s flexible software packages
- Energy tunability Maximise throughput and sensitivity with up to 5 different incident x-ray spectra
- Large Travel and Enclosure Enables unsupervised overnight scans. Also provides opportunity to integrate correlative techniques such as Raman Spectroscopy
System Features
- FAAST™ microfocus X-ray source with 50x higher brightness than sources used in existing non-synchrotron microXRFs due to innovative X-ray target material design and provides up to 5 different spectra in a single source
- X-ray mirror lens unique design collects 10x more fluorescence X-rays versus conventional designs
- 500x higher throughput versus existing synchrotron and non-synchrotron microXRFs
- Optional dual energy source for maximum flexibility
- Quantitative Analysis with standards-based or standardless approaches with wide range of flexible and intuitive software routines, from mineralogy to semiconductor-focused wafer pattern navigation, flexible and customisable Jupyter notebooks, and fundamental parameters analysis for weight percentages
- >1000X sensitivity of SEM-EDS for simultaneously acquiring a range of elements with the ability to measure thin films and dopants at sub-angstrom sensitivity and nanometer resolution.
- Chemical imaging at <8um and down to 5ms/point, with trace element detection in seconds
Key Advantages
All the benefits of the AttoMap-200, plus, advances exclusive to the AttoMap-310, including:
- Achieves shallow angle imaging for thin samples (e.g., biological) and/or diffraction removal AttoMap-310 features a goniometer to enable normal to shallow angle of incidence imaging
- Light element detection Analyse down to trace-level organics within the AttoMap’s high vacuum chamber
System Features
- Patented high brightness x-ray source with 50X brightness over those used in other leading microXRF systems and provides up to 5 different spectra in a single source
- Mirror Lens x-ray optics with major advantages over conventional polycapillary microXRF systems
- Goniometer stage for variable angle imaging (3 to 90 degrees)
- Vacuum enclosure that achieves down to <10^-4 Torr
- Wide range of flexible and intuitive software routines, from mineralogy to semiconductor-focused wafer pattern navigation, flexible and customisable Jupyter notebooks, and fundamental parameters analysis for weight percentages
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Supplier Info
Applications
Mineralogy
Automated mineralogy using scanning electron microscope (SEM) has become a dominant approach used in natural resource exploration and process monitoring. AttoMap provides a powerful complement to SEM-based mineralogy approaches by providing 1000X the sensitivity of SEM-EDS for trace elemental mapping. The system’s intuitive software provides AI-based grain segmentation and mineralogical identification.
Life Sciences and Metallomics
AttoMap was originally designed for life science research with support of NIH funding. Applications in the life sciences include studying pathologies (e.g., cancer and Wilson’s Disease) that are hypothesized to be related to dysregulation of trace elements such as iron and copper, the distribution of nanoparticle-based therapeutics after injection, and environmental uptake of contaminants.
Semiconductor
AttoMap has been adopted by leading semiconductor companies for monitoring dopants and ultrathin films on test patterns. The system also provides trace-level measurements of organic contaminants and low atomic number (Z) materials such as B within its vacuum environment. Pattern recognition based software enables unsupervised, recipe-based acquisition of points for high efficiency. For backend packaging, AttoMap provides high throughput metrology of micropillar dimensions, quantification of voids in microbumps, and rapid identification of defects.
Environmental / Botany
Synchrotron XRF has become a technique of choice for many plant scientists for understanding element distribution. Such studies include metal uptake for photoremediation (reclaiming the environment), nutrient uptake, and genetically modified plants for desirable characteristics such as drought-resistance and improvement to nutritional content.
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