Model FWPX Cryogenic Probe Station
Lake Shore’s FWPX probe station is designed for researchers who require large-size wafer probing. The FWPX accommodates wafers up to 102 mm (4 in) in diameter and can be modified to accept up to 152 mm (6 in) wafers. This general purpose probe station is designed for researchers or engineers conducting material characterisation tests over large samples. It is also an effective unit for measuring organic materials.
The FWPX employs a continuous refrigeration system using either liquid helium or liquid nitrogen for wafer cooling. It operates over a temperature range of 4.5 K to 475 K with the option to extend the base temperature to 3.5 K. I-V, C-V, and microwave measurements are standard. The station is configurable with up to six thermally anchored micro-manipulated probe arms and is optimally designed for electro-optical testing.
Features of the Model FWPX Large-size wafer probe station
- Largest wafer sample size: 4 in
- Sample translation for rapid probing
- Customisable to accept 6 in wafers