NanoMEGAS Electron Precession Diffraction
Advanced imaging and diffraction tools for transmission electron microscopy
NanoMEGAS are a company who specialise in Electron Diffraction (ED) applications. Electron Diffraction Crystallographic Tomography for structure determination of unknown crystal phases, Automated Orientation and Phase Mapping (ASTAR) analysis, as well as strain and plastic deformation analysis (Topspin).
All these techniques are based on Precession Electron Diffraction acquired data in TEM and are high‐end techniques that can be applied for various materials of high scientific and/or industrial interest. These state‐of‐the‐art approaches can be applied in any TEM providing results within spatial resolutions up to 1‐3nm (ASTAR, TopSPIN) when a FEG nanobeam is used. Such resolution makes these applications unique, and able to shed light to local properties of materials, like thin films, metals, batteries, ceramics, semiconductors.
TEM Orientation Imaging
ASTAR can turn any TEM into a very powerful analytical tool enabling orientation– phase imaging at 1 nm resolution attainable (FEG TEM) in combination with other TEM analytical techniques. In combination with TOPSPIN simultaneous orientation/phase/strain /STEM maps are possible.
Texture of metals is linked to specific physical properties so the need to characterise it at nm scale with novel ASTAR orientation imaging technique.
Faster chip performances in electronic devices push copper interconnects at < 3 nm scale, so the need for novel TEM based texture ASTAR characterisation technique. Plasticity mechanism studies of freestanding Pd-films with nanoscale twins.
Nanoparticle crystal structure and texture are very important for drug delivery and catalysis properties and need novel TEM characterisation techniques.
TEM Strain Mapping Analysis
Novel Automated Strain Mapping Solution for TEM/STEM (Patent pending) based on nanobeam precession diffraction patterns in combination with DigiSTAR. Precision up to 0.02% (200kV FEG) with spatial resolution up to 2nm attainable (FEG-TEM).
High spatial resolution, high precision strain mapping in modern semiconductor devices
Acquisition of STEM reference image
Ultra-fast nanobeam precession electron diffraction scanned acquisition
Typical acquisition time: 5-10 min (150x150)
Time per pixel: 10-40 ms Analysis time 5-10 min
Automated local strain analysis via AppFive proprietary algorithm
Acquisition from individual positions, line profiles, areas
Spatial resolution < 2 nm attainable (FEG TEM)
Monitor engineered strain distributions in modern semiconductor devices
Expected sensitivity: < 2 x 10-4
In combination with TOPSPIN simultaneous orientation/ phase/strain/STEM maps are possible.
3D Diffraction Topography
3D Precession Topography is the structure of complex nanocrystalline structures which can be solved ab-initio with precession electron diffraction.
DigiSTAR-precession electron diffraction (PED) device enables the collection of quasi-kinematical intensities (X-Ray like) in any TEM. PED in combination with powerful software (3D difffraction tomography) enables the reconstruction of the reciprocal cell of any nanomaterial and the automatic measurement of the reflection intensities.
Compatible with any TEM
Diffraction data collection with any CCD cameras
Enhanced EELS and EDX Spectroscopy
Beam Precession in EELS & EDX spectroscopy enhance the signal reducing channelling effects. Automated quantification with statistical error analysis is available. Multiple scattering derived from an automatically measured relative thickness.
Highly-automated EELS elemental analysis
Minimal user input required
Specify elements to quantify
Chemical shift of each elemental edge
Automated quantification with statistical error analysis
Multiple scattering derived from an automatically measured relative thickness
Elemental core-loss edges from several possible sources:
•Theoretical : Hartree-Slater (Rez)
•Experimental edges from reference materials
Digital STEM & TEM imaging
Synchronised beam scanning and precession diffraction with multi-signal data acquisition.
Advanced control of NanoMEGAS DigiSTAR and external optical CCD camera
Digital STEM imaging with beam precession control
PED patterns from multiple discrete points, lines and areas
Assisted calibrations (camera length, distortion correction)
On-line distortion corrected diffraction pattern acquisition
Improved workflow Phase and Orientation Mapping
STEM image acquisition
BF/DF/HAADF from STEM detectors present on the TEM
Virtual BF/DF via external optical CCD
Video-rate imaging using external optical CCD camera (binocular position)
Multiple scan modes
Fast acquisition of diffraction patterns
On-line distortion correction
Suite of image processing features
Topspin all in one platform
Topspin is a digital STEM, Beam Precession and Analytical Experiment Framework offering a suite of beam precession-enabled imaging and advanced analytical experiments.
Turn-key Solution (Hardware & Experiments) that upgrades your STEM to enable new advanced experiments enabled by Precession Electron Diffraction Scanned Acquisition in combination with DigiSTAR.