J A Woollam Spectroscopic Ellipsometers

RC2

The RC2 design builds on 25 years of experience. It combines the best features of previous models with innovative new technology: dual rotating compensators, achromatic compensator design, advanced light source and next-generation spectrometer design. The RC2 is a near-universal solution for the diverse applications of spectroscopic ellipsometry.

Wide Spectral Range

Collect over 1000 wavelengths from the ultraviolet to the near infrared, all simultaneously.

Fast Measurement Speed

Synchronous operation of both compensators allows highly accurate data without waiting to “zone-average” over optical elements. Collect the entire spectrum (over 1000 wavelengths) simultaneously in a fraction of a second.

RC2 Accessories

Liquid Studies

Add cell with optical windows for measurement through liquid ambient. Monitor the liquid/solid interface in real-time. Temperature-controlled options available.

Temperature Control

Add heat stage or cryostat for variable temperature studies. Measure samples at low and elevated temperatures.

Porous Sample Chuck

Allows flat mounting of thin plastic substrates.

QCM-D Mounting Stage

Combine SE and QCM-D measurements to detect sub-monolayer changes in thickness and mass.

Alpha SE

For routine measurements of thin film thickness and refractive index, this ellipsometer allows you to mount a sample, choose the model that matches your film, and press “measure”. You have results within seconds.

Easy-to-Use

Push-button operation is complemented by advanced software that takes care of the work for you.

Powerful

Proven spectroscopic ellipsometer technology gives you both thickness and index with much higher certainty than other techniques.

Flexible

Works with your materials – dielectrics, semiconductors, organics, and more.

Affordable

Spectroscopic ellipsometry for simple sample systems.

Fast

Hundreds of wavelengths simultaneously collected in seconds for immediate results.

Alpha SE Accessories

Focussing

Perfect for non-uniform or small samples.

Reduce beam diameter to ~0.3mm

Quick and easy magnetic attachment - optics snap into position

No alignment or calibration required

Camera

View the focused beam measurement location.

10mm by 7mm field of view

Integrated image within CompleteEASE software

Translation

Fine-adjustment of the measurement location.

Manually adjust 12mm XY range with .025mm resolution

Integrated vacuum stage holds sample in place

Position the focused beam spot anywhere on the sample

VASE Ellipsometer

The VASE® is an accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more.

It combines high accuracy and precision with a wide spectral range – up to 193 to 3200nm. Variable wavelength and angle of incidence allow flexible measurement capabilities, including:

Reflection and Transmission Ellipsometry
Generalized Ellipsometry (Anisotropy, Retardance, Birefringence)
Reflectance (R) and Transmittance (T) intensity
Cross-polarised R/T
Depolarisation
Scatterometry
Mueller-matrix

VASE Accessories

Camera

Add camera with display to view spot location on sample. The light beam may not appear on smooth, specular surfaces.  Commonly sold with Standard or Alternate Focusing.

Automated Translation (150x150mm)

Translator Size: 150×150 mm XY

Standard stage and Translation stage are swappable

Automated Translation (50x50mm)

Translator Size: 50×50 mm XY

Includes two exchangeable stages.

Open stage with hole for transmission mapping (41×41 mm)

Standard stage and Translation stage are swappable.

Commonly sold with Alternate Focusing

Standard Focusing

100 or 200 μm beam diameter depending on installed optical fiber.

Commonly sold with Camera

Alternate Focusing

200 or 400 μm beam diameter depending on installed optical fibre.

Commonly sold with Camera and 50×50 mm Automated Translation

Cryostat

Temperature range: 4.2 to 500 Kelvin OR 4.2 to 800 Kelvin

Angle: 70°

Includes UHV chamber/cryostat, turbo pump and temperature controller.

Cryostat can be installed and removed, which allows the user to switch between the standard sample stage and the cryostat

Wide-Range Temperature Stage

Temperature range: -70°C to 600°C

Angle: 70°

Active Cooling with Liquid Nitrogen

Sample area 22mm in diameter

Standard Heat Stage (HTC-100)

Temperature range: Room Temp to 300°C

Angle: 70°

Passive Cooling

Sample area up to 50mm diameter

Rotation Stage

Automated high precision sample rotation (360° Theta-only) stage.

Useful when studying anisotropy. Through-hole behind sample allows transmitted beam measurements from normal incidence (0°) to ±19°.

Standard stage and rotation stage are swappable

Manual Sample Translation

50-50mm-manual-vertical-translation-stage

Translator Size: 50×50 mm XY

Standard stage and Manual Sample Translation stage are swappable

Liquid Prism Cell

The liquid minimum deviation cell is used to determine liquid refractive index (n and k) using a hollow prism cell.  Measure minimum deviation angles through the liquid filled prism.  Two cells are included:

6 mL (60° angle of incidence)

5 mL (30° angle of incidence)

Features Automated Z-Translation

37mL Electrochemical Cell

General purpose liquid cell with vertical mount above liquid line for convenient electrochemical work

5mL Vertical Liquid Cell

General purpose liquid cell with 5mL volume

270µL Vertical Liquid Cell

Ultra low-volume liquid cell. (Minimum sample size 8 mm x 21 mm)

IR-VASE Mark II Ellipsometer

The IR-VASE® is the first and only spectroscopic ellipsometer to combine the chemical sensitivity of FTIR spectroscopy with thin film sensitivity of spectroscopic ellipsometry. The IR-VASE covers the wide spectral range from 1.7 to 30 microns (333 to 5900 wavenumbers). It is used to characterise both thin films and bulk materials in research and industry. This rapidly growing technology is finding uses in the optical coatings, semiconductor, biological and chemical industries, as well as research labs.

Non-destructive Characterisation

The IR-VASE offers non-contact, non-destructive measurements of many different material properties. Measurements do not require vacuum, and can be used to study liquid/solid interfaces common in biology and chemistry applications.

High Sensitivity to Ultra-thin Films

Spectroscopic ellipsometry data contain both “phase” and “amplitude” information from reflected or transmitted light. The phase information from IR ellipsometry offers higher sensitivity to ultrathin films than FTIR reflection/absorbance, while retaining the sensitivity to chemical composition.

IR-VASE Mark II Ellipsometer Accessories

Cryostat

Temperature range: 4.2 to 500 Kelvin OR 4.2 to 800 Kelvin

Angle: 70°

Includes UHV chamber/cryostat, turbo pump and temperature controller.

Cryostat can be installed and removed, which allows the user to switch between the standard sample stage and the cryostat

Wide-Range Temperature Stage

Temperature range: -70°C to 600°C

Angle: 70°

Active Cooling with Liquid Nitrogen

Sample area 22mm in diameter

Standard Heat Stage (HTC-100)

Temperature range: Room Temp to 300°C

Angle: 70°

Passive Cooling

Sample area up to 50mm diameter

Rotation Stage

Automated high precision sample rotation (360° Theta-only) stage.

Useful when studying anisotropy. Through-hole behind sample allows transmitted beam measurements from normal incidence (0°) to ±19°

Standard stage and rotation stage are swappable

Manual Sample Translation

Translator Size: 50×50 mm XY

Standard stage and Manual Sample Translation stage are swappable

VUV-VASE Ellipsometer

The VUV-VASE® variable angle spectroscopic ellipsometer is the gold standard for optical characterisation of lithography thin films. It measures wavelengths from vacuum ultraviolet (VUV) to near infrared (NIR). This provides incredible versatility to characterise numerous materials: semiconductors, dielectrics, polymers, metals, multi-layers and liquids such as immersion fluids.

Wide Spectral Range

The VUV-VASE covers wavelengths from below 140nm to 1700nm.

High Accuracy

Utilising Woollam’s patented AutoRetarder®, the VUV-VASE guarantees accuracy for any sample measurement.

Convenient Sample Loading

Special design allows fast, efficient sample loading without contaminating system purge.

Protect Your Samples

The monochromator is placed before the sample to limit exposure of photosensitive materials.

WVASE Software

WVASE® is the most powerful and comprehensive ellipsometric analysis program available. It provides more modelling options than any other program. WVASE® employs state of the art mathematical fitting algorithms for the fastest, most accurate, fits to your data. In addition to modelling and analysing the ellipsometric data, WVASE® also analyses and/or simulates reflectance and transmission data (Neutron reflectivity data, also, for analysis of very tin films such as organics).

Generalized Oscillator Layer

Build your own oscillators, beginning with a number of built-in functions, including:

Lorentz
Gaussian
Harmonic
Drude
Tauc-Lorentz
Cody-Lorentz
Tanguy
PSEMI

CompleteEASE Software

The next generation of ellipsometry software has arrived with CompleteEASE®, revolutionary new software for Woollam ellipsometers. It’s easier than ever to use, and with the world-class quality you’ve come to expect from Woollam Company.

Versatile Measurements

CompleteEASE® is an all-inclusive software package to handle all your ellipsometry requirements. Conveniently measure the uniformity of your samples with automated sample mapping. Collect in-situ data with spectroscopic ellipsometry on your process chamber or with add-on temperature control stage or liquid cell. All your data acquisition needs are combined into one easy-to-use software package.

Lab to Fab Operation

Suitable for both research and production environments. CompleteEASE is designed with advanced features for use in the research lab. Then transfer to the factory floor running automated recipes with user-programmable scan patterns, fast data acquisition, and automated analysis models.