PRODUCT CONTACT:

Shayz Ikram
Product Specialist
+44 (0)1372 378822




J A Woollam Spectroscopic Ellipsometers

Ex-Situ Ellipsometry

We offer a wide range of ex-situ spectroscopic ellipsometers, optimised for your particular application. The flexible ellipsometer VASE, based on a scanning monochromator is ideal for all kinds of R&D applications, covering the widest spectral range in the market from 140 to 3200 nm, or in combination with IR-VASE up to 30 µm.

Alternatively, Woollam’s fast CCD based, rotating compensator spectroscopic ellipsometers M-2000 and RC2 are available for ex-situ as well as in-situ applications.  Woollam also offer the entry level alphaSE for routine measurements of thin film thickness and refractive index.

Contact: Shayz Ikram
Product Specialist
+44 (0)1372 378822
shayz@qd-uki.co.uk

SPECIFICATION OVERVIEW

  • FEATURES:
  • Wide spectral range
  • Revolutionary CompleteEASE software
  • Fast data acquisition
  • Models

    M2000

    The M-2000 line of spectroscopic ellipsometers is engineered to meet the diverse demands of thin film characterisation. An advanced optical design, wide spectral range, and fast data acquisition combine in an extremely powerful and versatile tool. 

    M-2000 delivers both speed and accuracy.  J A Woollam’s patented RCE technology combines Rotating Compensator Ellipsometry with high-speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second with a wide array of configurations. 

    M-2000 is the first ellipsometer to truly excel at everything from in-situ monitoring and process control to large-area uniformity mapping and general purpose thin film characterisation. No other ellipsometer technology acquires a full spectrum faster.

     

    Wide Spectral Range

    Collect over 700 wavelengths from the ultraviolet to the near infrared – all simultaneously.

     

    Flexible System Integration

    With modular optical design, the M-2000 is suited for direct attachment to your process chamber or configured on any of Woollam’s table-top bases.

     

    Accuracy

    Advanced design ensures accurate ellipsometry measurements for any sample.

     

    M2000 Accessories

    Mapping

    Map thin film uniformity and other properties. Computer controlled or manual mapping options available. Available in sizes from small samples requiring focused measurements up to large flat panel display glass.

     

    Focusing & Camera

    Add focusing optics to reduce beam diameter. Standard focusing optics are detachable for normal use. Camera option also available to view spot location on sample.

     

    Automated Alignment

    Computer automated tip-tilt and sample height options provide quick, effortless sample alignment.

     

    Transmission

    Transmission accessories are available for horizontal M-2000 systems to hold samples vertically in the path of the light beam. Normal incidence or variable angle options available.

    Automated 300 x 300 mm XY mapping. 

     

    Sample Rotation

    Computer controlled and manual options available to rotate sample 360°. Useful when studying anisotropy.

    RC2

    The RC2 design builds on 25 years of experience. It combines the best features of previous models with innovative new technology: dual rotating compensators, achromatic compensator design, advanced light source and next-generation spectrometer design. The RC2 is a near-universal solution for the diverse applications of spectroscopic ellipsometry.

     

    Wide Spectral Range

    Collect over 1000 wavelengths from the ultraviolet to the near infrared, all simultaneously.

     

    Fast Measurement Speed

    Synchronous operation of both compensators allows highly accurate data without waiting to “zone-average” over optical elements. Collect the entire spectrum (over 1000 wavelengths) simultaneously in a fraction of a second.

     

    RC2 Accessories

     

    Liquid Studies

    Add cell with optical windows for measurement through liquid ambient. Monitor the liquid/solid interface in real-time. Temperature-controlled options available.

     

    Temperature Control

    Add heat stage or cryostat for variable temperature studies. Measure samples at low and elevated temperatures.

     

    Porous Sample Chuck

    Allows flat mounting of thin plastic substrates.

     

    QCM-D Mounting Stage

    Combine SE and QCM-D measurements to detect sub-monolayer changes in thickness and mass.

    Alpha SE

    For routine measurements of thin film thickness and refractive index, this ellipsometer allows you to mount a sample, choose the model that matches your film, and press “measure”. You have results within seconds.

     

    Easy-to-Use

    Push-button operation is complemented by advanced software that takes care of the work for you.

     

    Powerful

    Proven spectroscopic ellipsometer technology gives you both thickness and index with much higher certainty than other techniques.

     

    Flexible

    Works with your materials – dielectrics, semiconductors, organics, and more.

     

    Affordable

    Spectroscopic ellipsometry for simple sample systems.

     

    Fast

    Hundreds of wavelengths simultaneously collected in seconds for immediate results.

     

    Alpha SE Accessories

     

    Focussing

    Perfect for non-uniform or small samples.

    Reduce beam diameter to ~0.3mm

    Quick and easy magnetic attachment - optics snap into position

    No alignment or calibration required

     

    Camera

    View the focused beam measurement location.

    10mm by 7mm field of view

    Integrated image within CompleteEASE software

     

    Translation

    Fine-adjustment of the measurement location.

    Manually adjust 12mm XY range with .025mm resolution

    Integrated vacuum stage holds sample in place

    Position the focused beam spot anywhere on the sample

    VASE Ellipsometer

    The VASE® is an accurate and versatile ellipsometer for research on all types of materials: semiconductors, dielectrics, polymers, metals, multi-layers, and more.

    It combines high accuracy and precision with a wide spectral range – up to 193 to 3200nm. Variable wavelength and angle of incidence allow flexible measurement capabilities, including:

    Reflection and Transmission Ellipsometry
    Generalized Ellipsometry (Anisotropy, Retardance, Birefringence)
    Reflectance (R) and Transmittance (T) intensity
    Cross-polarised R/T
    Depolarisation
    Scatterometry
    Mueller-matrix

     

    VASE Accessories

     

    Camera

    Add camera with display to view spot location on sample. The light beam may not appear on smooth, specular surfaces.  Commonly sold with Standard or Alternate Focusing.

     

    Automated Translation (150x150mm)

    Translator Size: 150×150 mm XY

    Standard stage and Translation stage are swappable

     

    Automated Translation (50x50mm)

    Translator Size: 50×50 mm XY

    Includes two exchangeable stages.

    Open stage with hole for transmission mapping (41×41 mm)

    Standard stage and Translation stage are swappable.

    Commonly sold with Alternate Focusing

     

    Standard Focusing

    100 or 200 μm beam diameter depending on installed optical fiber.

    Commonly sold with Camera

     

    Alternate Focusing

    200 or 400 μm beam diameter depending on installed optical fibre.

    Commonly sold with Camera and 50×50 mm Automated Translation

     

    Cryostat

    Temperature range: 4.2 to 500 Kelvin OR 4.2 to 800 Kelvin

    Angle: 70°

    Includes UHV chamber/cryostat, turbo pump and temperature controller.

    Cryostat can be installed and removed, which allows the user to switch between the standard sample stage and the cryostat

     

    Wide-Range Temperature Stage

    Temperature range: -70°C to 600°C

    Angle: 70°

    Active Cooling with Liquid Nitrogen

    Sample area 22mm in diameter

     

    Standard Heat Stage (HTC-100)

    Temperature range: Room Temp to 300°C

    Angle: 70°

    Passive Cooling

    Sample area up to 50mm diameter

     

    Rotation Stage

    Automated high precision sample rotation (360° Theta-only) stage.

    Useful when studying anisotropy. Through-hole behind sample allows transmitted beam measurements from normal incidence (0°) to ±19°.

    Standard stage and rotation stage are swappable

     

    Manual Sample Translation

    50-50mm-manual-vertical-translation-stage

    Translator Size: 50×50 mm XY

    Standard stage and Manual Sample Translation stage are swappable

     

    Liquid Prism Cell

    The liquid minimum deviation cell is used to determine liquid refractive index (n and k) using a hollow prism cell.  Measure minimum deviation angles through the liquid filled prism.  Two cells are included:

    6 mL (60° angle of incidence)

    5 mL (30° angle of incidence)

     

    Features Automated Z-Translation

    37mL Electrochemical Cell

    General purpose liquid cell with vertical mount above liquid line for convenient electrochemical work

     

    5mL Vertical Liquid Cell

    General purpose liquid cell with 5mL volume

     

    270µL Vertical Liquid Cell

    Ultra low-volume liquid cell. (Minimum sample size 8 mm x 21 mm)

    IR-VASE Mark II Ellipsometer

    The IR-VASE® is the first and only spectroscopic ellipsometer to combine the chemical sensitivity of FTIR spectroscopy with thin film sensitivity of spectroscopic ellipsometry. The IR-VASE covers the wide spectral range from 1.7 to 30 microns (333 to 5900 wavenumbers). It is used to characterise both thin films and bulk materials in research and industry. This rapidly growing technology is finding uses in the optical coatings, semiconductor, biological and chemical industries, as well as research labs.

     

    Non-destructive Characterisation

    The IR-VASE offers non-contact, non-destructive measurements of many different material properties. Measurements do not require vacuum, and can be used to study liquid/solid interfaces common in biology and chemistry applications.

     

    High Sensitivity to Ultra-thin Films

    Spectroscopic ellipsometry data contain both “phase” and “amplitude” information from reflected or transmitted light. The phase information from IR ellipsometry offers higher sensitivity to ultrathin films than FTIR reflection/absorbance, while retaining the sensitivity to chemical composition.

     

    IR-VASE Mark II Ellipsometer Accessories

     

    Cryostat

    Temperature range: 4.2 to 500 Kelvin OR 4.2 to 800 Kelvin

    Angle: 70°

    Includes UHV chamber/cryostat, turbo pump and temperature controller.

    Cryostat can be installed and removed, which allows the user to switch between the standard sample stage and the cryostat

     

    Wide-Range Temperature Stage

    Temperature range: -70°C to 600°C

    Angle: 70°

    Active Cooling with Liquid Nitrogen

    Sample area 22mm in diameter

     

    Standard Heat Stage (HTC-100)

    Temperature range: Room Temp to 300°C

    Angle: 70°

    Passive Cooling

    Sample area up to 50mm diameter

     

    Rotation Stage

    Automated high precision sample rotation (360° Theta-only) stage.

    Useful when studying anisotropy. Through-hole behind sample allows transmitted beam measurements from normal incidence (0°) to ±19°

    Standard stage and rotation stage are swappable

     

    Manual Sample Translation

    Translator Size: 50×50 mm XY

    Standard stage and Manual Sample Translation stage are swappable

    VUV-VASE Ellipsometer

    The VUV-VASE® variable angle spectroscopic ellipsometer is the gold standard for optical characterisation of lithography thin films. It measures wavelengths from vacuum ultraviolet (VUV) to near infrared (NIR). This provides incredible versatility to characterise numerous materials: semiconductors, dielectrics, polymers, metals, multi-layers and liquids such as immersion fluids.

     

    Wide Spectral Range

    The VUV-VASE covers wavelengths from below 140nm to 1700nm.

     

    High Accuracy

    Utilising Woollam’s patented AutoRetarder®, the VUV-VASE guarantees accuracy for any sample measurement.

     

    Convenient Sample Loading

    Special design allows fast, efficient sample loading without contaminating system purge.

     

    Protect Your Samples

    The monochromator is placed before the sample to limit exposure of photosensitive materials.

    WVASE Software

    WVASE® is the most powerful and comprehensive ellipsometric analysis program available. It provides more modelling options than any other program. WVASE® employs state of the art mathematical fitting algorithms for the fastest, most accurate, fits to your data. In addition to modelling and analysing the ellipsometric data, WVASE® also analyses and/or simulates reflectance and transmission data (Neutron reflectivity data, also, for analysis of very tin films such as organics).

     

    Generalized Oscillator Layer

    Build your own oscillators, beginning with a number of built-in functions, including:

    Lorentz
    Gaussian
    Harmonic
    Drude
    Tauc-Lorentz
    Cody-Lorentz
    Tanguy
    PSEMI

    CompleteEASE Software

    The next generation of ellipsometry software has arrived with CompleteEASE®, revolutionary new software for Woollam ellipsometers. It’s easier than ever to use, and with the world-class quality you’ve come to expect from Woollam Company.

     

    Versatile Measurements

    CompleteEASE® is an all-inclusive software package to handle all your ellipsometry requirements. Conveniently measure the uniformity of your samples with automated sample mapping. Collect in-situ data with spectroscopic ellipsometry on your process chamber or with add-on temperature control stage or liquid cell. All your data acquisition needs are combined into one easy-to-use software package.

     

    Lab to Fab Operation

    Suitable for both research and production environments. CompleteEASE is designed with advanced features for use in the research lab. Then transfer to the factory floor running automated recipes with user-programmable scan patterns, fast data acquisition, and automated analysis models.

    Supplier info:

    For even more information, why not visit our suppliers website.

    VISIT SUPPLIER

    MEDIA:

    Introduction to the alpha-SE Spectroscopic Ellipsometer

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    Introduction to J.A. Woollam Co.

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